This article is part of our exclusive IEEE Journal Watch series in partnership with IEEE Xplore. Data storage has long contributed a significant portion of the computing industry’s carbon footprint, even representing as much as 1.8 percent of the United ...
In the complex quest to keep increasing the density of transistors, extreme ultraviolet (EUV) lithography is the most critical tool. Costing more than US $100 million, these trailer-size systems bounce near x-ray wavelength light off of a complex cascade of ...
